Photoconductive Element and Sensor Device

ABSTRACT

There is provided a photoconductive element capable of generating and detecting broadband electromagnetic waves such as terahertz waves at a comparatively high efficiency by decreasing or avoiding the absorption of electromagnetic waves into a substrate. A photoconductive element  1  includes a photoconductive film  5  exhibiting conductivity by the radiation of light, a substrate  6  holding the photoconductive film and a thin film sandwiched between the photoconductive film  5  and the substrate  6 , the thin film being different in composition from the photoconductive film  5  and the substrate  6 . The photoconductive film  5  is provided with an antenna  7  having a gap portion  2  and an electrode  4  electrically connectable to the antenna  7 . At least a part of the photoconductive film where the gap portion  2  of the antenna  7  is located is single crystal. The substrate  6  has an opening portion  3  at a part corresponding to a part of the photoconductive film  5  where the gap portion  2  of the antenna  7  is located.

BACKGROUND OF THE INVENTION

1. Field of the Invention The present invention relates to aphotoconductive element generating and detecting electromagnetic wavesby the radiation of light and a method of manufacturing the same, and inparticular, to a photoconductive element generating and detectingelectromagnetic waves including at least a part of a frequency range of30 GHz to 30 THz (hereinafter referred to as “terahertz wave”) asfrequency components by the radiation of light, a method ofmanufacturing the same, and a sensor device using the same.

2. Description of the Related Art

A non-destructive sensing technique using the terahertz wave has beendeveloped in recent years. The electromagnetic wave in this frequencyrange finds its application in fields including an imaging technique fora safe fluoroscopic device substituting X rays, a spectroscopictechnique in which absorption spectrum and complex dielectric constantinside a substance are determined to survey bonding state, a techniquefor analyzing biological molecules and a technique for evaluatingcarrier density and mobility.

A photoconductive element with an antenna serving also as an electrodeprovided on a photoconductive film with a thickness in the range ofmicrometers deposited on a substrate is suitably used as a terahertzwave generating unit (refer to Japanese Patent Application Laid-Open No.H10-104171. FIG. 7 illustrates an example of the configuration of thephotoconductive element. A substrate 130 has, for example, aradiation-treated silicon-on-sapphire structure in which a silicon filmas a photoconductive material is deposited on a sapphire substrate. Ingeneral, LT-GaAs grown on a GaAs substrate at low temperature isfrequently used as a photoconductive film. A dipole antenna 138 formedon the surface includes a pair of dipole feeders 138 a and 138 b and apair of dipole arms 139 a and 139 b. Optical pulses are focused in a gap133. A voltage is applied across the gap to generate a terahertz wavepulse. If optical current is detected without the voltage applied acrossthe gap, the terahertz wave pulse can be detected. A substrate lens 136has a role to combine an electromagnetic wave from a slab mode(substrate mode) confined in the substrate 130 to a free-space radiationmoment and to control the radiation angle of electromagnetic-wavepropagation mode in space.

As shown in FIG. 7, passing through the substrate, a terahertz wave isgenerated, which is a typical configuration. Another configuration hasbeen proposed in which a terahertz wave to be generated is taken out ofthe surface of a photoconductive film to prevent the wave from beingdispersed and absorbed in the substrate (refer to Applied PhysicsLetters, vol. 85, p. 164, 2004).

The photoconductive film functioning to generate such a terahertz wavepulse is made only of a thin film formed on the substrate and thesubstrate has a role to hold the thin film. However, the substrate hasthe property of decreasing the transmittance of terahertz wavesgenerated from the photoconductive film, decreasing efficiency in thegeneration of terahertz waves radiating from the other side of thesubstrate.

The proposal described in Applied Physics Letters, vol. 85, p. 164,2004, which is of surface-generation type, has a configuration in whichelectromagnetic waves are reflected against incident laser beams, whichcomplicates an optical locatement. In addition, the substrate has aconfinement effect as a dielectric substance, for this reason,efficiency in the generation of electromagnetic waves on the surfacecannot be practically increased so much.

A GaAs substrate is required when LT-GaAs is used as a photoconductivefilm. However, the substrate has a significant absorption due to opticalphonon in the vicinity of a frequency of 7 THz. This lacks terahertzwaves in the range of this absorption, causing a bottleneck inperforming a terahertz-wave spectroscopy. The absorption is small in thesurface-generation type disclosed in Applied Physics Letters, vol. 85,p. 164, 2004, however, it cannot be avoided.

SUMMARY OF THE INVENTION

The present invention is directed to a photoconductive element forgenerating and detecting electromagnetic waves comprising: aphotoconductive film exhibiting conductivity by the radiation of light;a substrate holding the photoconductive film; and a thin film sandwichedbetween the photoconductive film and the substrate, the thin film beingdifferent in composition from the photoconductive film and thesubstrate; wherein the photoconductive film is provided with an antennahaving a gap portion and an electrode electrically connectable to theantenna, and the substrate has an opening portion at least at a partwhere the gap portion of the antenna is located.

The thin film can include a material different from the substrate andthe photoconductive film in etching rate for an etchant.

The thin film can be single crystal and has a strain structure differentin lattice constant from at least one of the substrate and thephotoconductive film.

In the photoconductive element, a material different from the substratecan be inserted into at least a part of the opening.

The side wall of the substrate forming the opening can have such atapered shape that the opening portion gradually increases in sizetoward the outside of the element.

The element can be so adapted that the radiation of light into the gapportion generates and detects electromagnetic waves including at least apart of frequency range of 30 GHz to 30 THz as frequency components.

The opening can have a dimension larger than the wavelength of theelectromagnetic waves to be generated or detected.

In the photoconductive element, an optical element converging theelectromagnetic waves to be generated or detected can be fitted into theopening.

In the photoconductive element, a part of the photoconductive film wherethe gap portion of the antenna is located can be single crystal.

The present invention is directed to a method of manufacturing thephotoconductive element comprising the steps of: forming a thin filmdifferent in composition from the photoconductive film and the substrateon the substrate; forming a photoconductive film on the thin film;forming the antenna having the gap portion on the photoconductive film;and etching the portion of the substrate corresponding to the portion ofphotoconductive film where the gap potion of the antenna is located fromthe side of the substrate opposite to the side where the gap portionexists so that the face of the thin film with a size larger than thewavelength of the electromagnetic wave is exposed.

The present invention is directed to a sensor device comprising thephotoconductive element as at least one of an electromagnetic wavegenerating element and an electromagnetic wave detecting element,wherein electromagnetic waves generated by the electromagnetic wavegenerating element are caused to interact with a specimen, theinteracting electromagnetic waves are detected by the electromagneticwave detecting element, and a change is measured between the propagationstate of the detected electromagnetic waves and the propagation state ofelectromagnetic waves detected by the electromagnetic wave detectingelement when the specimen does not exist or the specimen changes,thereby acquiring information on the specimen.

The opening is formed by, for example, removing and thinning thesubstrate on the side of substrate, i.e., on the other side of theopening. Wherein, the antenna is a generic name for a portion whereelectromagnetic waves radiate or are combined and does not always referto a specific shape. The gap refers to a distance between metallic partsand ranges for example from micrometers to millimeters.

In view of the above problems, the sensor device according to thepresent invention is provided with the above photoconductive element asat least one of the electromagnetic wave generating element and theelectromagnetic wave detecting element. Electromagnetic waves from theelectromagnetic wave generating element are caused to interact with aspecimen to detect the electromagnetic waves subjected to theinteraction by the electromagnetic wave detecting element to measure achange between the propagation state of the detected electromagneticwaves and that of the detected electromagnetic waves when a specimendoes not exist or a specimen changes. This enables acquiring informationon the physical properties of the specimen.

According to the present invention, the photoconductive element providedwith the above opening allows generating and detecting broadbandelectromagnetic waves in the terahertz range in a comparatively highefficiency. For this reason, a comparatively high-sensitive spectralcharacteristic can be evaluated in a relatively wide frequency range,for example, by terahertz time-domain spectroscopy.

Further features of the present invention will become apparent from thefollowing description of exemplary embodiments with reference to theattached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A and 1B are a top view and a perspective view illustrating thephotoconductive element according to a first embodiment of the presentinvention respectively.

FIGS. 2A, 2B, 2C and 2D are process charts describing an example of themethod of producing the photoconductive element according to the firstembodiment of the present invention.

FIG. 3 is a diagram describing a terahertz measuring system using thephotoconductive element according to the present invention.

FIG. 4 is a perspective view of a photoconductive element of a secondembodiment according to the present invention.

FIG. 5 is a cross section of a photoconductive element of a thirdembodiment according to the present invention.

FIG. 6 is a diagram describing another antenna configuration in thepresent invention.

FIG. 7 is a perspective view illustrating an example of a conventionalterahertz generating section.

DESCRIPTION OF THE EMBODIMENTS

The embodiment of the present invention is described below. In oneembodiment of the present invention, an antenna which serves also as anelectrode is prepared on the photoconductive film formed on thesubstrate and then the part of the substrate around the antenna isetched to remove it with only a part of the photoconductive film left toa size larger than the wavelength of generated or detectedelectromagnetic wave. An etching stop layer may be formed in advance onthe substrate when the photoconductive film is formed on the substratefor the purpose of performing the above etching. The etching stop layermay be left as it is after the substrate has been removed or only onelayer of photoconductive film may be left after a further removal. Atthis point, the substrate is not all removed but may be leftthin-filmed. Such a configuration allows reducing or avoiding theinfluence of absorption peculiar to the substrate to enable providing abroadband terahertz time-domain spectroscopic instrument.

A resin (different from the substrate in material) small in absorptionof electromagnetic waves may be embedded into at least a part of thehole (opening) of the substrate to reinforce the substrate. In addition,an optical element such as a ball lens low in refractive index toconverge generated or detected electromagnetic waves is located in thehole made in the substrate or in a part of the hole into which areinforced material is embedded, thereby decreasing reflection loss andimproving NA (numerical aperture). Thus, a terahertz-wave use efficiencycan be improved. The side wall of the opening formed in the substrate istapered to gradually increase the size of the hole (opening) toward theoutside of the element to form a horn-antenna shape, thereby improvingefficiency in the collection and convergence of electromagnetic waves.

In the above photoconductive element, laser beams may be caused to beincident on any of the surfaces of the photoconductive film or thesubstrate where the hole is made. The use of the photoconductive elementfor both generation and detection of electromagnetic waves makes iteffective to extend a measuring band in a terahertz time-domainspectroscopy.

EMBODIMENTS

Examples of embodiments are described in detail below.

First Embodiment

The first embodiment of the present invention is described withreference to FIGS. 1A and 1B. In a photoconductive element 1 accordingto the present invention, an epitaxial growth film 5 made of an AlAslayer (not shown) and a low temperature (LT) grown GaAs is formed on asemi-insulating (SI) GaAs substrate 6. An electrode 4 which serves alsoas a dipole antenna is formed on the surface of the LT-GaAs and about5-μm gap portion 2 is located at the center of the antenna. Where, theAlAs layer is 0.1 μm in thickness and the LT-GaAs layer 5 is 2 μm inthickness. A dipole antenna formed in an antenna portion 7 is 30 μm inlength. However, the numeric values and antenna shape are not limited tothose stated herein. While a pair of the electrodes 4 and the antennaportion 7 are formed on the same plane as the epitaxial growth film 5 inthe example illustrated in the figure, the epitaxial growth film may beinterposed between a pair of the electrodes and the antenna portion toform a pair of the electrodes and the antenna portion on both the faces,providing the gap portion in the epitaxial growth film.

The portion of the GaAs substrate 6 on the other side of the area wherethe gap portion 2 and the antenna portion 7 are formed is hollowed outand removed to a diameter of about 5 mm to form an opening 3 illustratedin FIG. 1B. The opening 3 is formed by using both dry etching byreactive ion etching (RIE) using Gl₂ plasma and wet etching using mixedliquor of ammonia and hydrogen peroxide. The wet etchant can remove GaAsbut slow in etching rate of AlAs, which is used to stop the etching atthe AlAs layer. Thereafter, an etching stop layer AlAs is removed byhydrochloric acid. However, the etching stop layer may be left withoutremoving. Thus, the thin film of the AlAs layer uses a materialdifferent in etching rate for a specific etchant from the substrate 6and the photoconductive film of the LT-GaAs layer 5.

If such an etching stop layer does not exist, it is not easy to flattenthe bottom face after etching has been performed to remove the substratebecause the etching rate is different between the periphery and thecenter portion when hole etching is performed from the substrate side.The existence of the etching stop layer ensures that a flat and mirrorplane surface is formed which does not exert influence such asscattering on terahertz waves. For this reason, the etching stop layercan be provided to remove the substrate to such an extent that theetching stop layer is reached.

The use of the configuration reduces or prevents the absorption ofterahertz waves into a conventional GaAs substrate to improve efficiencyin the generation of electromagnetic waves. At the same time, a strongabsorption due to phonon in the vicinity of a frequency of 7 THzdisappears, so that the radiation of a laser beam 8 allows a broadbandterahertz pulse 9 to be generated in the transmission-type locatementillustrated in FIG. 1B. Furthermore, a broadband terahertz light can bedetected.

At this point, the AlAs layer as the etching stop layer has turned intoa layer higher in crystallinity than the LT-GaAs. For this reason, theinfluence of damage of the GaAs substrate surface on the LT-GaAs isreduced as compared with cases where the AlAs layer does not exist,bringing the advantage of increasing efficiency in the generation anddetection of terahertz waves.

On the other hand, if the etching stop layer does not exist, there canbe a method in which a hole is made in advance on the other side of thesubstrate, the hole is filled up with a material except a singlecrystal, the surface is polished again and the LT-GaAs layer isdeposited thereon. However, in the above method, the LT-GaAs layer isdeposited on a non-single crystal layer, so that the LT-GaAs film isturned polycrystal or amorphous, which makes it difficult to increaseefficiency in the generation of electromagnetic waves. In this respect,if the above typical etching stop layer is provided, the LT-GaAs layercan be single crystal in the vicinity of the gap portion of the antennain the area where the hole is made. In general, the single crystal isdefined as something which the same molecular groups arethree-dimensionally located with a certain constant regularity in asolid within a specified range. In the photoconductive element of thepresent invention, the LT-GaAs layer is single crystal at least in thevicinity of the gap portion 2 formed at the antenna portion 7 toincrease efficiency in the generation of electromagnetic waves.Furthermore, a strain resulting from a slight difference in latticeconstant between the AlAs layer and the GaAs layer is expected toimprove characteristics. In other words, when the substrate 6 is removedwith the single crystal AlAs layer larger in lattice constant than theGaAs substrate left, a pseudocrystal AlAs film exhibits an intrinsiclattice constant to attract strain by the LT-GaAs layer 5 of thephotoconductive film thereon, resultantly improving the mobility ofcarriers in the LT-GaAs layer to improve characteristics such asefficiency in the generation and detection of electromagnetic waves.

FIG. 3 illustrates the configuration of the terahertz time-domainspectroscopic instrument (THz-TDS) using the above substrate-removedphotoconductive element. In the configuration, a photoconductive element(electromagnetic wave generating element) 32 according to the presentembodiment is radiated with light with a wavelength of 800 nm from alaser 30 generating a 10-femtosecond ultrashort pulse through a chopper31. A 10-V voltage is applied across the gap of the antenna portion tocause the photoconductive element 32 to generate terahertz waves. Theterahertz wave passes through a parabolic mirror 33 and a lens 34 to beproperly converged and be incident on a specimen 35. The terahertz wavetransmitted through the specimen 35 is similarly incident on aphotoconductive element (electromagnetic wave generating element) 38through a lens 36 and a parabolic mirror 37.

The face on the other side of the photoconductive element 38 is radiatedwith light beams from the femtosecond laser 30 branched by mirrors 45 to48. Terahertz waveforms are observed while a delay time is being variedwith a delay optical system 44. The above is similar to an ordinaryTHz-TDS instrument and the others are also similar to an ordinaryTHz-TDS instrument. Signals are processed in a lock-in amplifier 42 andPC 43 through an amplifier 39. That is to say, resolution data ofintensity of the pulse electromagnetic wave transmitted through thespecimen 35 in each delay time is sequentially stored as time-seriesdata and Fourier transformed by the PC 43 to be transformed intofrequency space. Thus, the intensity amplitude and the optical spectrumof phase of the pulse electromagnetic wave transmitted through thespecimen 35 are obtained. Incidentally, reference numeral 40 is a mixerand 41 is an oscillator. In the above system, when the specimen 35 doesnot exist, Fourier spectra which gradually decrease to at least about 10THz without absorption at 7 THz are obtained, which permits themeasurement of the complex dielectric constant of the specimen 35 in abroad band without the lack of a frequency band.

Using this sensor, electromagnetic waves generated by theelectromagnetic wave generating element are caused to interact with thespecimen and the interacting electromagnetic waves are detected by theelectromagnetic wave detecting element. A change can be measured betweenthe propagation state of the detected electromagnetic waves and that ofthe detected electromagnetic waves when the specimen does not exist or aspecimen changes. Such a measurement enables acquiring information onthe physical properties of the specimen.

As described above, the THz-TDS instrument illustrated in FIG. 3 iscapable of measuring signals including those around 7 THz by using thephotoconductive element according to the present embodiment both forgeneration and for detection. Needless to say, the photoconductiveelement according to the present embodiment may be used for only one ofgeneration and detection.

As stated above, in the photoconductive element according to the presentembodiment, the opening 3 is formed in a part of the substrate 6 holdingthe photoconductive film 5 (or a part corresponding to the area wherethe gap portion 2 of the antenna portion 7 is located), as illustratedin FIGS. 1A and 1B, to prevent the GaAs substrate 6 from absorbingterahertz waves due to an optical phonon. This realizes the elementcapable of generating and detecting terahertz waves at a comparativelyhigh efficiency and at a broad band. For this reason, in the forgoingterahertz time-domain spectroscopy, spectral characteristics can beevaluated in a relatively high sensitivity and in a comparatively broadfrequency range.

An example of a process for producing the photoconductive element isdescribed below with reference to FIG. 2A to 2D. In FIG. 2A, an AlAsetching stop layer 10 and the LT-GaAs film 5 are epitaxially grown onthe SI—GaAS substrate 6 by molecular beam epitaxy (MBE). A graded layergradually varying in Al composition may be provided on an interfacebetween the two layers if needed. All the epitaxial layers are not dopedand have the thickness described above. The above process is a firststep in which the LT-GaAs photoconductive film 5 and the thin film ofthe AlAs etching stop layer 10 different in composition from thesubstrate 10 are formed on the substrate 6 and a second step in whichthe LT-GaAs photoconductive film 5 is formed on the surface of the thinfilm of the AlAs etching stop layer 10.

In FIG. 2B, an antenna 11 serving also as an electrode including AuGe,Ni and Au is formed on the surface of the LT-GaAs film 5 by a lift-offprocess and annealed at a temperature of 400° C. to improve contact. Thesurface pattern is shown in FIGS. 1A and 1B. This process is a thirdstep in which the antenna 7 with the gap portion 2 is formed on thesurface of the LT-GaAs film 5. After that, in FIG. 2C, the substrate 6is thinned to a thickness of about 100 μm by polishing.

In addition, in FIG. 2D, a part of the substrate 6 to be etched issubjected to a 5-mm diameter hole pattering (not shown) withphotolithography using a double sided aligner and dry-etched to about 90μm using the RIE mentioned earlier. Furthermore, the other 10-μm portionis wet-etched by the above etchant. This enables a 5-mm circular hole(opening) 3 to be formed. The above process is a fourth step in which apart with a diameter of 100 μm or more of the substrate 6 is etched onthe side of substrate, i.e., on the other side of the opening to such anextent that the face of the thin film 10 is exposed, in the part of thesubstrate 6 corresponding to the part of the photoconductive film 5where the gap potion of the antenna is located. The opening portion 3may be larger in dimension than the wavelength of electromagnetic waveto be generated or detected, so that diameter can be properly designedaccording to the wavelength of a targeted electromagnetic wave. In thepresent embodiment, the substrate 6 can be etched to such an extent thatthe thin film of the AlAs etching stop layer 10 is exposed, however, the10-μm thinned substrate portion may be left without wet etching.

In addition, the etching conditions are controlled when the substrate isetched to cause the side wall to be tapered outwardly, thereby causingthe antenna to function as a horn antenna (FIG. 2D illustrates theoutwardly tapered hole 3). The thickness of a resist mask for etchingmay be tapered to control an etching depth depending on places to formthe taper shape of the side wall. The formation of such a horn antennacauses the space combination of terahertz waves to be generated anddetected to have directivity, allowing the improvement of efficiency inthe collection and convergence of terahertz waves. Metal such as Au orAl may be coated on the side wall to improve a reflection coefficient.

Second Embodiment

The second embodiment according to the present invention is describedbelow. FIG. 4 illustrates the second embodiment. The substrate 6 and theepitaxial layer 5 in FIG. 4 are the same as those in the firstembodiment in configuration. In the present embodiment, a spherical,hemispheric or aspherical lens 12 is fitted into a hole (opening) madeby removing the substrate to converge terahertz waves. Resin such aspolyethylene, polyolefin or Teflon (trade name) or quartz may be used asa material for the lens. Hitherto, the existence of the substrate causesreflection due to a refractive index difference (for example, adifference between a refractive index of 3.5 of the substrate and arefractive index of 1.5 of a low refractive index material), so that ithas been difficult to use a low refractive index material. However, theremoval of the substrate allows a lens of a low refractive indexmaterial to be located in the vicinity of an electrode of a terahertzwave generating source. Thus, the advantage can be fully used that a lowrefractive index material is low in reflection loss. Adhesive such asepoxy resin may be used to fix the lens 12.

In the present embodiment, an optical element such as the lens 12 forconverging electromagnetic waves to be generated or detected is fittedinto an opening, further improving efficiency in the use of terahertzwaves and S/N of the THz-TDS instrument.

Third Embodiment

FIG. 5 illustrates the third embodiment according to the presentinvention. In FIG. 5, the substrate 6, the etching stop layer 10, thephotoconductive film 5 and the antenna 7 are the same in configurationas those in the above embodiments, so that description thereof isomitted. In the present embodiment, a material 64 with an appropriatethickness such as resin which less absorbs terahertz waves and light isembedded into a hole (opening) made by removing the substrate toreinforce a thinned photoconductive film 62.

Resin such as polyimide, polyethylene, SU-8 and BCB can be used as amaterial 64 for embedding the hole 3 (opening) of the substrate 6. A dipportion 65 may be provided on the resin 64 used for embedding the holeby photolithography and RIE to be located to the center of an antennagap (gap portion) formed on the surface of the LT-GaAs layer. Thisrealizes a configuration in which the laser beam is incident from theside of the substrate 60, contrary to the above embodiment, to generateterahertz waves from the surface of the LT-GaAs layer. This allows thedip portion 65 to be taken as an alignment target of the laser beam tofurther reduce the absorption of terahertz waves into the resin 64.

In the present embodiment in which the thinned photoconductive film 62is reinforced, the opening of the substrate 6 is allowed to be furtherincreased to 1 cm in diameter. This enables terahertz waves with a widerange to be spatially taken out without repellence by the wall face ofopening of the substrate 6.

In the present embodiment, a circle is taken as an example of theopening in the substrate and described, however, other shapes such as asquare, rectangle or ellipse may be used. In addition, for the antenna,various types of antennas such as a bow tie, slot and spiral may be usedinstead of the dipole antenna. Furthermore, as illustrated in FIG. 6, aphotoconductive element 71 may be formed in which a gap portion(opening) between two electrodes 4 is set to 50 μm to 500 μm and thearea around any one of the electrodes 4 is radiated with light, insteadof a definite shape of an antenna.

The following materials can be used as the photoconductive film as wellas GaAs: compound semiconductor (for example, InGaAs, InGaSb, InAs andInN) which are selected from Al, Ga and In as III group elements and N,P, As and Sb as V group elements; semiconductor including IV groupelements such as Si and Ge; and II-VI group elements such as ZnSe. Thosematerials can be applied as long as they are photoconductive.

In the above embodiment, a description is made of the system using afemtosecond laser as an excitation light source for THz-TDS measurement.However, the following well-known method is available as another method.A difference between oscillating frequencies of two stable CWoscillation light sources is tuned to a desired terahertz band toradiate the photoconductive element with the oscillating light togenerate continuous terahertz waves corresponding to the beatfrequencies of the oscillating frequencies, thereby performing aterahertz wave spectral measurement. In this case, the variation of thebeat frequencies allows a spectral measurement.

While the present invention has been described with reference toexemplary embodiments, it is to be understood that the invention is notlimited to the disclosed exemplary embodiments. The scope of thefollowing claims is to be accorded the broadest interpretation so as toencompass all such modifications and equivalent structures andfunctions.

This application claims the benefit of Japanese Patent Application No.2006-073613, filed Mar. 17, 2006, and No. 2006-342883 filed Dec. 20,2006, which are hereby incorporated by reference herein in theirentirety.

1-11. (canceled)
 12. A photoconductive element for generating anddetecting electromagnetic waves, comprising: a photoconductive film thatexhibits conductivity from radiation of light; a substrate holding thephotoconductive film; and a thin film sandwiched between thephotoconductive film and the substrate, the thin film including amaterial different from the substrate and the photoconductive film inetching rate by an etchant, wherein the photoconductive film is providedwith an antenna having a gap portion and an electrode electricallyconnectable to the antenna, and wherein the substrate has an openingportion at least at a part where the gap portion of the antenna islocated.
 13. The photoconductive element according to claim 1, whereinthe electromagnetic wave is a terahertz wave.